Inventor

BUERGEL CHRISTIAN

DE4 patents

⚠️ This page may combine multiple inventors who share the name “BUERGEL CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCZYRBA MARTIN

1 patent

US8257888B2Sep 4, 2012

Particle beam writing method, particle beam writing apparatus and maintenance method for same

SCZYRBA MARTIN23 citations83

GLOBALFOUNDRIES SG PTE LTD

1 patent

US9500945B1Nov 22, 2016

Pattern classification based proximity corrections for reticle fabrication

GLOBALFOUNDRIES SG PTE LTD9 citations82

STEAG HAMATECH APE GMBH & CO K

1 patent

US7419549B2Sep 2, 2008

Nozzle assembly for applying a liquid to a substrate

STEAG HAMATECH APE GMBH & CO K2 citations46

ADVANCED MASK TECH CENTER GMBH & CO KG

1 patent

US9405185B2Aug 2, 2016

Shape metrology for photomasks

ADVANCED MASK TECH CENTER GMBH & CO KG0 citations38