Inventor
BUTTERBAUGH JEFFERY W
US23 patents
⚠️ This page may combine multiple inventors who share the name “BUTTERBAUGH JEFFERY W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL FSI INC
9 patentsUS10991610B2Apr 27, 2021
Systems and methods for treating substrates with cryogenic fluid mixtures
TEL FSI INC4 citations82
US10062596B2Aug 28, 2018
Systems and methods for treating substrates with cryogenic fluid mixtures
TEL FSI INC5 citations82
US10020217B2Jul 10, 2018
Systems and methods for treating substrates with cryogenic fluid mixtures
TEL FSI INC5 citations82
US10843236B2Nov 24, 2020
Systems and methods for rotating and translating a substrate in a process chamber
TEL FSI INC5 citations72
US10014191B2Jul 3, 2018
Systems and methods for treating substrates with cryogenic fluid mixtures
TEL FSI INC5 citations71
US10748789B2Aug 18, 2020
Systems and methods for treating substrates with cryogenic fluid mixtures
TEL FSI INC1 citations60
US9691628B2Jun 27, 2017
Process for silicon nitride removal selective to SiGex
TEL FSI INC0 citations46
US9299570B2Mar 29, 2016
Process for silicon nitride removal selective to SiGex
TEL FSI INC0 citations46
US11207715B2Dec 28, 2021
System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays
TEL FSI INC0 citations43
FSI INT INC
6 patentsUS6124211ASep 26, 2000
Cleaning method
FSI INT INC89 citations97
US6015503AJan 18, 2000
Method and apparatus for surface conditioning
FSI INT INC89 citations95
US7025831B1Apr 11, 2006
Apparatus for surface conditioning
FSI INT INC57 citations94
US7819984B2Oct 26, 2010
Process for treatment of substrates with water vapor or steam
FSI INT INC17 citations90
US6465374B1Oct 15, 2002
Method of surface preparation
FSI INT INC18 citations82
US6107166AAug 22, 2000
Vapor phase cleaning of alkali and alkaline earth metals
FSI INT INC9 citations73
FSI INT
4 patentsUS5716495AFeb 10, 1998
Cleaning method
FSI INT120 citations97
US5534107AJul 9, 1996
UV-enhanced dry stripping of silicon nitride films
FSI INT114 citations97
US5580421ADec 3, 1996
Apparatus for surface conditioning
FSI INT250 citations95
US5782986AJul 21, 1998
Process for metals removal using beta-diketone or beta-ketoimine ligand forming compounds
FSI INT44 citations92
TEL MFG AND ENGINEERING OF AMERICA INC
2 patentsUS11458512B2Oct 4, 2022
Systems and methods for rotating and translating a substrate in a process chamber
TEL MFG AND ENGINEERING OF AMERICA INC0 citations62
US11355376B2Jun 7, 2022
Systems and methods for treating substrates with cryogenic fluid mixtures
TEL MFG AND ENGINEERING OF AMERICA INC0 citations60