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Inventor
RATKOVICH ANTHONY S
US
3 patents
⚠️ This page may combine multiple inventors who share the name “RATKOVICH ANTHONY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL FSI INC
2 patents
US9691628B2
Jun 27, 2017
Process for silicon nitride removal selective to SiGex
TEL FSI INC
0 citations
46
US9299570B2
Mar 29, 2016
Process for silicon nitride removal selective to SiGex
TEL FSI INC
0 citations
46
RATKOVICH ANTHONY S
1 patent
US9059104B2
Jun 16, 2015
Process for selectively removing nitride from substrates
RATKOVICH ANTHONY S
2 citations
52