Inventor
CHOU BO-WEI
TW7 patents
Patents
7 patentsUS10005990B2Jun 26, 2018
Cleaning method for semiconductor device fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12362203B2Jul 15, 2025
Method for etching etch layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11784065B2Oct 10, 2023
Method for etching etch layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12347692B2Jul 1, 2025
Wet bench process with in-situ pre-treatment operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10283384B2May 7, 2019
Method for etching etch layer and wafer etching apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9687885B2Jun 27, 2017
Multi-cycle wafer cleaning method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40
US9881816B2Jan 30, 2018
Cleaning composition and method for semiconductor device fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations33