Inventor

VAN BEUZEKOM AART ADRIANUS

NL6 patents

⚠️ This page may combine multiple inventors who share the name “VAN BEUZEKOM AART ADRIANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents

US7724351B2May 25, 2010

Lithographic apparatus, device manufacturing method and exchangeable optical element

ASML NETHERLANDS BV12 citations89

US7576835B2Aug 18, 2009

Substrate handler, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations60

US10916453B2Feb 9, 2021

Lithographic apparatus, method of transferring a substrate and device manufacturing method

ASML NETHERLANDS BV0 citations57

US11226568B2Jan 18, 2022

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations56

US10409174B2Sep 10, 2019

Lithographic apparatus, method of transferring a substrate and device manufacturing method

ASML NETHERLANDS BV0 citations47

VAN DER SCHOOT HARMEN KLAAS

1 patent

US8174680B2May 8, 2012

Substrate handler, lithographic apparatus and device manufacturing method

VAN DER SCHOOT HARMEN KLAAS0 citations42