Inventor
SEGERS HUBERT MARIE
NL6 patents
⚠️ This page may combine multiple inventors who share the name “SEGERS HUBERT MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS10916453B2Feb 9, 2021
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations57
US7679714B2Mar 16, 2010
Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method
ASML NETHERLANDS BV0 citations49
US7106420B2Sep 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US10409174B2Sep 10, 2019
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations47
US7394525B2Jul 1, 2008
Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method
ASML NETHERLANDS BV0 citations36