Inventor
FAHRNI FRANCIS
NL5 patents
⚠️ This page may combine multiple inventors who share the name “FAHRNI FRANCIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS12072636B2Aug 27, 2024
Fluid handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US10916453B2Feb 9, 2021
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations57
US10409174B2Sep 10, 2019
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations47
US11762304B2Sep 19, 2023
Lithographic apparatus
ASML NETHERLANDS BV0 citations44