Inventor
PIETERSE GERBEN
NL17 patents
⚠️ This page may combine multiple inventors who share the name “PIETERSE GERBEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US12072636B2Aug 27, 2024
Fluid handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10908517B2Feb 2, 2021
Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method
ASML NETHERLANDS BV0 citations60
US10916453B2Feb 9, 2021
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations57
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10409174B2Sep 10, 2019
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations47
US11048178B2Jun 29, 2021
Lithographic apparatus with improved patterning performance
ASML NETHERLANDS BV0 citations46
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40
US10095129B2Oct 9, 2018
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus
ASML NETHERLANDS BV0 citations40
US10627721B2Apr 21, 2020
Lithography apparatus, and a method of manufacturing a device
ASML NETHERLANDS BV0 citations36