Inventor
VAN DEN EIJNDEN PEPIJN
NL5 patents
Patents
5 patentsUS11860546B2Jan 2, 2024
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11454892B2Sep 27, 2022
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11029607B2Jun 8, 2021
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US10916453B2Feb 9, 2021
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations57
US10409174B2Sep 10, 2019
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations47