Inventor
VAN DONGEN PAUL
NL5 patents
Patents
5 patentsUS10916453B2Feb 9, 2021
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations57
US11226568B2Jan 18, 2022
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations56
US12399436B2Aug 26, 2025
Substrate holder, carrier system comprising a substrate holder and lithographic apparatus
ASML NETHERLANDS BV0 citations53
US10409174B2Sep 10, 2019
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations47
US10656536B2May 19, 2020
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37