Inventor

WILLEMS BAS

NL2 patents

Patents

2 patents

US10916453B2Feb 9, 2021

Lithographic apparatus, method of transferring a substrate and device manufacturing method

ASML NETHERLANDS BV0 citations57

US10409174B2Sep 10, 2019

Lithographic apparatus, method of transferring a substrate and device manufacturing method

ASML NETHERLANDS BV0 citations47