Inventor
FANG HAN CHUAN
SG6 patents
Patents
6 patentsUS9117695B1Aug 25, 2015
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP11 citations79
US10446689B1Oct 15, 2019
Manufacturing method of oxide semiconductor device
UNITED MICROELECTRONICS CORP4 citations71
US8901003B1Dec 2, 2014
Polishing method of semiconductor structure
UNITED MICROELECTRONICS CORP6 citations68
US8716104B1May 6, 2014
Method of fabricating isolation structure
UNITED MICROELECTRONICS CORP5 citations65
US10446688B1Oct 15, 2019
Oxide semiconductor device and manufacturing method thereof
UNITED MICROELECTRONICS CORP0 citations50
US9754788B2Sep 5, 2017
Manufacturing method of semiconductor structure including planarizing a polysilicon layer over an array area and a periphery area
UNITED MICROELECTRONICS CORP0 citations47