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Inventor
DANIELS STEPHEN
IE
7 patents
⚠️ This page may combine multiple inventors who share the name “DANIELS STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DANIELS STEPHEN
2 patents
US9842726B2
Dec 12, 2017
Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate
DANIELS STEPHEN
13 citations
78
US8242789B2
Aug 14, 2012
Plasma system and measurement method
DANIELS STEPHEN
4 citations
52
(unassigned)
1 patent
US6441620B1
Aug 27, 2002
Method for fault identification in a plasma process
35 citations
88
SECR DEFENCE BRIT
1 patent
US4290432A
Sep 22, 1981
Decompression bubble detectors
SECR DEFENCE BRIT
13 citations
71
SOBERON FELIPE
1 patent
US8945467B2
Feb 3, 2015
Method and apparatus for the sterilisation of articles
SOBERON FELIPE
4 citations
64
NUWAVE SENSOR TECH LIMITED
1 patent
US10456785B2
Oct 29, 2019
Method and apparatus for remote identification and monitoring of airborne microbial activity
NUWAVE SENSOR TECH LIMITED
3 citations
54
HAYDEN CHANEL MOIRA PIA
1 patent
US10031109B2
Jul 24, 2018
Optoacoustic inspection device for inspection of semiconductor wafers
HAYDEN CHANEL MOIRA PIA
0 citations
34