Inventor
YAO AKIFUMI
JP34 patents
⚠️ This page may combine multiple inventors who share the name “YAO AKIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CENTRAL GLASS CO LTD
23 patentsUS10741406B2Aug 11, 2020
Dry etching method
CENTRAL GLASS CO LTD8 citations83
US11335573B2May 17, 2022
Dry etching method and β-diketone-filled container
CENTRAL GLASS CO LTD4 citations72
US11715641B2Aug 1, 2023
Method and device for etching silicon oxide
CENTRAL GLASS CO LTD3 citations71
US11618954B2Apr 4, 2023
Dry etching method, method for manufacturing semiconductor device, and etching device
CENTRAL GLASS CO LTD4 citations70
US11566177B2Jan 31, 2023
Dry etching agent, dry etching method and method for producing semiconductor device
CENTRAL GLASS CO LTD3 citations70
US10957554B2Mar 23, 2021
Etching method and etching device
CENTRAL GLASS CO LTD0 citations62
US12460132B2Nov 4, 2025
Method for supplying composition, composition and dry etching method
CENTRAL GLASS CO LTD0 citations61
US12387940B2Aug 12, 2025
Dry etching method
CENTRAL GLASS CO LTD0 citations61
US12125709B2Oct 22, 2024
Method and device for etching silicon oxide
CENTRAL GLASS CO LTD0 citations61
US11289340B2Mar 29, 2022
Dry etching method
CENTRAL GLASS CO LTD0 citations61
US11049729B2Jun 29, 2021
Dry etching method, semiconductor device manufacturing method, and chamber cleaning method
CENTRAL GLASS CO LTD1 citations61
US11282714B2Mar 22, 2022
Etching method and etching device
CENTRAL GLASS CO LTD0 citations60
US11519557B2Dec 6, 2022
Method for manufacturing filled container, and filled container
CENTRAL GLASS CO LTD0 citations58
US11447697B2Sep 20, 2022
Substrate processing gas, storage container, and substrate processing method
CENTRAL GLASS CO LTD0 citations58
US12145857B2Nov 19, 2024
Method for producing tungsten hexafluoride
CENTRAL GLASS CO LTD0 citations57
US12308244B2May 20, 2025
Dry etching method, method for producing semiconductor device, and etching device
CENTRAL GLASS CO LTD0 citations56
US11359278B2Jun 14, 2022
Treatment method and cleaning method for metal oxyfluorides
CENTRAL GLASS CO LTD0 citations56
US10926211B2Feb 23, 2021
Method for purifying fluorine compound gas
CENTRAL GLASS CO LTD1 citations56
US10872780B2Dec 22, 2020
Dry etching agent composition and dry etching method
CENTRAL GLASS CO LTD0 citations51
US10457866B2Oct 29, 2019
Dry etching gas and dry etching method
CENTRAL GLASS CO LTD0 citations51
US9929021B2Mar 27, 2018
Dry etching method and dry etching agent
CENTRAL GLASS CO LTD1 citations51
US12371618B2Jul 29, 2025
Dry etching method, method for producing semiconductor device, and dry etching gas composition
CENTRAL GLASS CO LTD0 citations45
US9708720B2Jul 18, 2017
Gas generation device
CENTRAL GLASS CO LTD0 citations41
YAO AKIFUMI
5 patentsUS8961631B2Feb 24, 2015
Process for production of dispersion of fluorinated nano diamond
YAO AKIFUMI0 citations50
US8790541B2Jul 29, 2014
Method for preparing fluorinated nanodiamond liquid dispersion
YAO AKIFUMI0 citations50
US8951393B2Feb 10, 2015
Fluorine gas generating apparatus
YAO AKIFUMI0 citations37
US8864960B2Oct 21, 2014
Fluorine gas generating apparatus
YAO AKIFUMI0 citations37
US9139918B2Sep 22, 2015
Fluorine gas generating apparatus
YAO AKIFUMI0 citations36