Inventor

TAKEDA Yuuta

JP2 patents

Patents

2 patents

US11618954B2Apr 4, 2023

Dry etching method, method for manufacturing semiconductor device, and etching device

CENTRAL GLASS CO LTD4 citations70

US11447697B2Sep 20, 2022

Substrate processing gas, storage container, and substrate processing method

CENTRAL GLASS CO LTD0 citations58