Inventor
CITLA BHARGAV S
US12 patents
Patents
12 patentsUS10950429B2Mar 16, 2021
Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom
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US11049537B2Jun 29, 2021
Additive patterning of semiconductor film stacks
APPLIED MATERIALS INC2 citations71
US11581183B2Feb 14, 2023
Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom
APPLIED MATERIALS INC0 citations62
US11798606B2Oct 24, 2023
Additive patterning of semiconductor film stacks
APPLIED MATERIALS INC0 citations61
US11631591B2Apr 18, 2023
Methods for depositing dielectric material
APPLIED MATERIALS INC0 citations61
US11566325B2Jan 31, 2023
Silicon carbonitride gapfill with tunable carbon content
APPLIED MATERIALS INC1 citations60
US12347674B2Jul 1, 2025
Directional selective deposition
APPLIED MATERIALS INC0 citations57
US12315718B2May 27, 2025
Forming films with improved film quality
APPLIED MATERIALS INC0 citations57
US11862458B2Jan 2, 2024
Directional selective deposition
APPLIED MATERIALS INC1 citations57
US11049731B2Jun 29, 2021
Methods for film modification
APPLIED MATERIALS INC0 citations56
US12476105B2Nov 18, 2025
Directional selective fill for silicon gap fill processes
APPLIED MATERIALS INC0 citations50
US11972943B2Apr 30, 2024
Methods and apparatus for depositing dielectric material
APPLIED MATERIALS INC0 citations48