Inventor

FREIMANN ROLF

DE41 patents

⚠️ This page may combine multiple inventors who share the name “FREIMANN ROLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FREIMANN ROLF

ZEISS CARL SMT GMBH

Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface

Method for aligning a mirror of a microlithographic projection exposure apparatus

Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective

Projection arrangement

Wafer holding device and projection microlithography system

Optical system

Optical system

Measuring apparatus for interferometrically determining a surface shape

Method and assembly for analysing the wavefront effect of an optical system

Method for aligning a mirror of a microlithographic projection exposure apparatus

Optical imaging device with image defect determination

Optical device

Optical imaging device with image defect determination

Projection exposure tool for microlithography with a radiation detector detecting radiation with high resolution over a two-dimensional area

Apparatus and method for the locally resolved measurement of a radiation distribution produced using a lithography mask

Projection objective of a microlithographic projection exposure apparatus

Method for producing a lens for a lithography apparatus, and measurement system

Projection exposure system for microlithography with a measurement device

Projection exposure system for microlithography with a measurement device

Measuring system

Imaging optical system for microlithography

ZEISS CARL SMT AG

Refractive projection objective

Refractive projection objective

Method for calibrating an interferometer apparatus, for qualifying an optical surface, and for manufacturing a substrate having an optical surface

Method for absolute calibration of an interferometer

Method of aligning an optical system

Method of manufacturing an optical system

Method and means for determining the shape of a rough surface of an object

Method for calibrating a radius test bench

Method of processing an optical element using an interferometer having an aspherical lens that transforms a first spherical beam type into a second spherical beam type

Method of manufacturing an optical component

Projection exposure system and method of manufacturing a miniaturized device

FREIMANN ROLF

Projection exposure system and use thereof

Projection illumination system

Optical imaging device with image defect determination

Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distribution

Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device

HETZLER JOCHEN

Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure

SCHILLKE FRANK

Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface

MUELLER ULRICH

Projection exposure system for microlithography with a measurement device

HOF ALBRECHT

Optical system, in particular in a microlithographic projection exposure apparatus