Inventor

DOERBAND BERND

DE25 patents

⚠️ This page may combine multiple inventors who share the name “DOERBAND BERND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DOERBAND BERND

ZEISS CARL SMT AG

Optical system, method of manufacturing an optical system and method of manufacturing an optical element

Method of calibrating an interferometer optics and of processing an optical element having an optical surface

Method for calibrating an interferometer apparatus, for qualifying an optical surface, and for manufacturing a substrate having an optical surface

Method of manufacturing an optical element

Method of processing an optical substrate

Interferometer system and method for recording an interferogram using weighted averaging over multiple frequencies, and method for providing and manufacturing an object having a target surface

Method of manufacturing an optical system

Phase shifting interferometric method, interferometer apparatus and method of manufacturing an optical element

System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape

Method of processing an optical element using an interferometer having an aspherical lens that transforms a first spherical beam type into a second spherical beam type

Method of manufacturing an optical component

Method and apparatus for interferometrically measuring the shape of a test object

Method of manufacturing an optical element

ZEISS CARL SMT GMBH

Method of measuring a deviation of an optical surface from a target shape

Method for aligning a mirror of a microlithographic projection exposure apparatus

Devices for determining layer thickness and/or contamination level of a belt

Method for aligning a mirror of a microlithographic projection exposure apparatus

Method for operating a projection exposure tool and control apparatus

DOERBAND BERND

Method and system for measuring a surface of an object

Method and an apparatus for measuring a deviation of an optical test surface from a target shape

Method and apparatus for determining a shape of an optical test surface

ARNOLD RALF

Method of measuring a deviation of an optical surface from a target shape using interferometric measurement results

Method of measuring a deviation of an optical surface from a target shape

HETZLER JOCHEN

Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure

FREIMANN ROLF

Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device