Inventor
TSUJI NORIHIKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TSUJI NORIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS10134619B2Nov 20, 2018
Connecting mechanism and connecting method of substrate container
TOKYO ELECTRON LTD20 citations84
US9732881B2Aug 15, 2017
Gate valve and substrate processing system
TOKYO ELECTRON LTD2 citations72
US11527426B2Dec 13, 2022
Substrate processing device
TOKYO ELECTRON LTD3 citations71
US7537628B2May 26, 2009
Exhaust trap device
TOKYO ELECTRON LTD6 citations71
US10811289B2Oct 20, 2020
Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber
TOKYO ELECTRON LTD1 citations60
US10867820B2Dec 15, 2020
Substrate transfer device and substrate transfer method
TOKYO ELECTRON LTD0 citations39