Inventor
HIRAOKA SUSUMU
JP7 patents
Patents
7 patentsUS5110407AMay 5, 1992
Surface fabricating device
HITACHI LTD521 citations98
US5108778AApr 28, 1992
Surface treatment method
HITACHI LTD33 citations92
US4886571ADec 12, 1989
Surface treatment and apparatus therefor
HITACHI LTD33 citations92
US5505778AApr 9, 1996
Surface treating apparatus, surface treating method and semiconductor device manufacturing method
HITACHI LTD24 citations91
US4828874AMay 9, 1989
Laser surface treatment method and apparatus for practicing same
HITACHI LTD23 citations82
US5401357AMar 28, 1995
Dry etching method
HITACHI LTD17 citations73
US6662115B2Dec 9, 2003
Method for comparison of DNA base sequences
HITACHI LTD3 citations60