Inventor
OZTURK MEHMET C
US2 patents
Patents
2 patentsUS5242847ASep 7, 1993
Selective deposition of doped silion-germanium alloy on semiconductor substrate
UNIV NORTH CAROLINA STATE159 citations97
US5336903AAug 9, 1994
Selective deposition of doped silicon-germanium alloy on semiconductor substrate, and resulting structures
UNIV NORTH CAROLINA STATE55 citations94