Inventor
KARLSRUD CHRIS E
US8 patents
⚠️ This page may combine multiple inventors who share the name “KARLSRUD CHRIS E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM CORP
7 patentsUS5329732AJul 19, 1994
Wafer polishing method and apparatus
SPEEDFAM CORP262 citations97
US5498199AMar 12, 1996
Wafer polishing method and apparatus
SPEEDFAM CORP198 citations96
US5498196AMar 12, 1996
Wafer polishing method and apparatus
SPEEDFAM CORP72 citations94
US5791975AAug 11, 1998
Backing pad
SPEEDFAM CORP46 citations91
US5274960AJan 4, 1994
Uniform velocity double sided finishing machine
SPEEDFAM CORP30 citations91
US5187901AFeb 23, 1993
Circumferential pattern finishing machine
SPEEDFAM CORP8 citations72
US5123218AJun 23, 1992
Circumferential pattern finishing method
SPEEDFAM CORP19 citations72