Inventor
VAN WOERKOM ANTHONY G
US5 patents
⚠️ This page may combine multiple inventors who share the name “VAN WOERKOM ANTHONY G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM CORP
4 patentsUS5486131AJan 23, 1996
Device for conditioning polishing pads
SPEEDFAM CORP212 citations98
US5329732AJul 19, 1994
Wafer polishing method and apparatus
SPEEDFAM CORP262 citations97
US5498199AMar 12, 1996
Wafer polishing method and apparatus
SPEEDFAM CORP198 citations96
US5498196AMar 12, 1996
Wafer polishing method and apparatus
SPEEDFAM CORP72 citations94