Inventor
YU TAT-KWAN
US7 patents
Patents
7 patentsUS5531861AJul 2, 1996
Chemical-mechanical-polishing pad cleaning process for use during the fabrication of semiconductor devices
MOTOROLA INC111 citations97
US5399234AMar 21, 1995
Acoustically regulated polishing process
MOTOROLA INC114 citations97
US6396158B1May 28, 2002
Semiconductor device and a process for designing a mask
MOTOROLA INC81 citations95
US5628862AMay 13, 1997
Polishing pad for chemical-mechanical polishing of a semiconductor substrate
MOTOROLA INC68 citations95
US5441598AAug 15, 1995
Polishing pad for chemical-mechanical polishing of a semiconductor substrate
MOTOROLA INC96 citations95
US6593226B2Jul 15, 2003
Method for adding features to a design layout and process for designing a mask
MOTOROLA INC34 citations90
US5674352AOct 7, 1997
Process related to a modified polishing pad for polishing
MOTOROLA INC4 citations62