Inventor
SASAKI ICHIROU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI ICHIROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS5134965AAug 4, 1992
Processing apparatus and method for plasma processing
HITACHI LTD866 citations98
US5531862AJul 2, 1996
Method of and apparatus for removing foreign particles
HITACHI LTD125 citations97
US5304277AApr 19, 1994
Plasma processing apparatus using plasma produced by microwaves
HITACHI LTD47 citations95
US4985109AJan 15, 1991
Apparatus for plasma processing
HITACHI LTD99 citations95
US5762814AJun 9, 1998
Plasma processing method and apparatus using plasma produced by microwaves
HITACHI LTD12 citations73