Inventor
IRINO KIYOSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “IRINO KIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
9 patentsUS6468926B1Oct 22, 2002
Manufacture method and system for semiconductor device with thin gate insulating film of oxynitride
FUJITSU LTD22 citations91
US6894369B2May 17, 2005
Semiconductor device having a high-dielectric gate insulation film and fabrication process thereof
FUJITSU LTD37 citations89
US6998303B2Feb 14, 2006
Manufacture method for semiconductor device with patterned film of ZrO2 or the like
FUJITSU LTD12 citations81
US6984267B2Jan 10, 2006
Manufacture system for semiconductor device with thin gate insulating film
FUJITSU LTD8 citations72
US5990517ANov 23, 1999
Semiconductor memory device containing nitrogen in a gate oxide film
FUJITSU LTD8 citations72
US7340352B2Mar 4, 2008
Inspecting method, inspecting apparatus, and method of manufacturing semiconductor device
FUJITSU LTD6 citations61
US6780699B2Aug 24, 2004
Semiconductor device and method for fabricating the same
FUJITSU LTD5 citations61
US7005393B2Feb 28, 2006
Method of fabricating a semiconductor device containing nitrogen in an oxide film
FUJITSU LTD0 citations50
US6979658B2Dec 27, 2005
Method of fabricating a semiconductor device containing nitrogen in a gate oxide film
FUJITSU LTD0 citations50