Inventor
TSAI KENNETH
US19 patents
⚠️ This page may combine multiple inventors who share the name “TSAI KENNETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6146463ANov 14, 2000
Apparatus and method for aligning a substrate on a support member
APPLIED MATERIALS INC412 citations99
US6271148B1Aug 7, 2001
Method for improved remote microwave plasma source for use with substrate processing system
APPLIED MATERIALS INC647 citations98
US6603269B1Aug 5, 2003
Resonant chamber applicator for remote plasma source
APPLIED MATERIALS INC252 citations97
US5985033ANov 16, 1999
Apparatus and method for delivering a gas
APPLIED MATERIALS INC57 citations96
US6328808B1Dec 11, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC44 citations95
US6026762AFeb 22, 2000
Apparatus for improved remote microwave plasma source for use with substrate processing systems
APPLIED MATERIALS INC54 citations95
US6592817B1Jul 15, 2003
Monitoring an effluent from a chamber
APPLIED MATERIALS INC59 citations92
US6374508B1Apr 23, 2002
Apparatus and method for aligning a substrate on a support member
APPLIED MATERIALS INC20 citations92
US6248176B1Jun 19, 2001
Apparatus and method for delivering a gas
APPLIED MATERIALS INC28 citations92
US6186092B1Feb 13, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC39 citations92
US6944006B2Sep 13, 2005
Guard for electrostatic chuck
APPLIED MATERIALS INC18 citations88
US7964085B1Jun 21, 2011
Electrochemical removal of tantalum-containing materials
APPLIED MATERIALS INC10 citations84
TSAI KENNETH
3 patentsUS8397381B2Mar 19, 2013
Method for manufacturing light set with surface mounted light emitting components
TSAI KENNETH33 citations91
US7926978B2Apr 19, 2011
Light set with surface mounted light emitting components
TSAI KENNETH41 citations91
US8111390B2Feb 7, 2012
Method and apparatus for residue detection in the edge deleted area of a substrate
TSAI KENNETH1 citations51