Inventor
PHAM QUYEN
US6 patents
Patents
6 patentsUS6271148B1Aug 7, 2001
Method for improved remote microwave plasma source for use with substrate processing system
APPLIED MATERIALS INC647 citations98
US6026762AFeb 22, 2000
Apparatus for improved remote microwave plasma source for use with substrate processing systems
APPLIED MATERIALS INC54 citations95
US6592817B1Jul 15, 2003
Monitoring an effluent from a chamber
APPLIED MATERIALS INC59 citations92
US7112961B2Sep 26, 2006
Method and apparatus for dynamically measuring the thickness of an object
APPLIED MATERIALS INC18 citations91
US7355394B2Apr 8, 2008
Apparatus and method of dynamically measuring thickness of a layer of a substrate
APPLIED MATERIALS INC9 citations80
US7777483B2Aug 17, 2010
Method and apparatus for measuring a thickness of a layer of a wafer
APPLIED MATERIALS INC3 citations61