Inventor

FURUYA MASAO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “FURUYA MASAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7000416B2Feb 21, 2006

Cooling apparatus and plasma processing apparatus having cooling apparatus

TOKYO ELECTRON LTD48 citations90

US6629423B1Oct 7, 2003

Processor and temperature control method therefor

TOKYO ELECTRON LTD32 citations90

HITACHI LTD

1 patent

US4419003ADec 6, 1983

Recording sheet conveying system of pressure fixing type electrostatic printing apparatus

HITACHI LTD32 citations92

DAIKIN IND LTD

1 patent

US6993919B2Feb 7, 2006

Processing apparatus and processing apparatus maintenance method

DAIKIN IND LTD17 citations82

FURUYA MASAO

1 patent

US8864932B2Oct 21, 2014

Plasma processing apparatus, electrode temperature adjustment device and electrode temperature adjustment method

FURUYA MASAO3 citations54