Inventor
TAKAHASHI YOUJI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI YOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS7828928B2Nov 9, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP10 citations92
US7335277B2Feb 26, 2008
Vacuum processing apparatus
HITACHI HIGH TECH CORP24 citations92
US7247207B2Jul 24, 2007
Vacuum processing apparatus
HITACHI HIGH TECH CORP11 citations92
US6586887B1Jul 1, 2003
High-frequency power supply apparatus for plasma generation apparatus
HITACHI HIGH TECH CORP28 citations88
US7833382B2Nov 16, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP1 citations62
US7025895B2Apr 11, 2006
Plasma processing apparatus and method
HITACHI HIGH TECH CORP2 citations58
US7976632B2Jul 12, 2011
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations52
US7125730B2Oct 24, 2006
Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same
HITACHI HIGH TECH CORP1 citations48
US6713885B2Mar 30, 2004
Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same
HITACHI HIGH TECH CORP0 citations48