Inventor
IIDA TSUTOMU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “IIDA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS9711375B2Jul 18, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP9 citations80
US7771608B2Aug 10, 2010
Plasma processing method and apparatus
HITACHI HIGH TECH CORP4 citations62
US7125730B2Oct 24, 2006
Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same
HITACHI HIGH TECH CORP1 citations48
US6713885B2Mar 30, 2004
Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same
HITACHI HIGH TECH CORP0 citations48
US10522333B2Dec 31, 2019
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations38
US9831096B2Nov 28, 2017
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations37