Inventor
KASHIBE MAKOTO
JP4 patents
Patents
4 patentsUS7025895B2Apr 11, 2006
Plasma processing apparatus and method
HITACHI HIGH TECH CORP2 citations58
US7125730B2Oct 24, 2006
Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same
HITACHI HIGH TECH CORP1 citations48
US6713885B2Mar 30, 2004
Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same
HITACHI HIGH TECH CORP0 citations48
US11232932B2Jan 25, 2022
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations47