P

Inventor

YEDUR SANJAY

US10 patents
⚠️ This page may combine multiple inventors who share the name “YEDUR SANJAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents
US7518740B2Apr 14, 2009

Evaluating a profile model to characterize a structure to be examined using optical metrology

TOKYO ELECTRON LTD9 citations82
US7702471B2Apr 20, 2010

Determining one or more profile parameters of a photomask covered by a pellicle

TOKYO ELECTRON LTD2 citations62
US7480062B2Jan 20, 2009

Automated process control using parameters determined from a photomask covered by a pellicle

TOKYO ELECTRON LTD4 citations62
US7639375B2Dec 29, 2009

Determining transmittance of a photomask using optical metrology

TOKYO ELECTRON LTD0 citations38

TIMBRE TECH INC

3 patents
US7092110B2Aug 15, 2006

Optimized model and parameter selection for optical metrology

TIMBRE TECH INC68 citations95
US7046375B2May 16, 2006

Edge roughness measurement in optical metrology

TIMBRE TECH INC41 citations92
US7394554B2Jul 1, 2008

Selecting a hypothetical profile to use in optical metrology

TIMBRE TECH INC10 citations82

UNIV MICHIGAN STATE

1 patent
US6265190B1Jul 24, 2001

Succinic acid production and purification

UNIV MICHIGAN STATE53 citations95

APPLIED CARBOCHEMICALS

1 patent
US5958744ASep 28, 1999

Succinic acid production and purification

APPLIED CARBOCHEMICALS57 citations94

ADVANCED MICRO DEVICES INC

1 patent
US6117618ASep 12, 2000

Carbonized antireflective coating produced by spin-on polymer material

ADVANCED MICRO DEVICES INC22 citations90