Inventor

HIAR TODD D

US3 patents

Patents

3 patents

US7738075B2Jun 15, 2010

Lithographic attribute enhancement

ASML NETHERLANDS BV7 citations67

US7906270B2Mar 15, 2011

Reduced pitch multiple exposure process

ASML NETHERLANDS BV6 citations59

US7981595B2Jul 19, 2011

Reduced pitch multiple exposure process

ASML NETHERLANDS BV0 citations38