Inventor
PAXTON THEODORE A
US7 patents
Patents
7 patentsUS6873938B1Mar 29, 2005
Adaptive lithographic critical dimension enhancement
ASML NETHERLANDS BV61 citations91
US6872014B1Mar 29, 2005
Method for developing a photoresist pattern
ASML NETHERLANDS BV17 citations82
US7274429B2Sep 25, 2007
Integrated lithographic fabrication cluster
ASML NETHERLANDS BV11 citations81
US7738075B2Jun 15, 2010
Lithographic attribute enhancement
ASML NETHERLANDS BV7 citations67
US7906270B2Mar 15, 2011
Reduced pitch multiple exposure process
ASML NETHERLANDS BV6 citations59
US7019268B2Mar 28, 2006
Wafer processing apparatus and method of use
ASML NETHERLANDS BV2 citations58
US7981595B2Jul 19, 2011
Reduced pitch multiple exposure process
ASML NETHERLANDS BV0 citations38