Inventor
AJMERA SAMEER KUMAR
US6 patents
Patents
6 patentsUS7476602B2Jan 13, 2009
N2 based plasma treatment for enhanced sidewall smoothing and pore sealing porous low-k dielectric films
TEXAS INSTRUMENTS INC10 citations82
US7189615B2Mar 13, 2007
Single mask MIM capacitor and resistor with in trench copper drift barrier
TEXAS INSTRUMENTS INC18 citations81
US7338893B2Mar 4, 2008
Integration of pore sealing liner into dual-damascene methods and devices
TEXAS INSTRUMENTS INC17 citations79
US7115467B2Oct 3, 2006
Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspect
TEXAS INSTRUMENTS INC9 citations72
US7781884B2Aug 24, 2010
Method of fabrication of on-chip heat pipes and ancillary heat transfer components
TEXAS INSTRUMENTS INC5 citations61
US7910936B2Mar 22, 2011
N2 based plasma treatment for enhanced sidewall smoothing and pore sealing of porous low-k dielectric films
TEXAS INSTRUMENTS INC1 citations50