Inventor
SMITH PATRICIA BEAUREGARD
US5 patents
Patents
5 patentsUS6713402B2Mar 30, 2004
Methods for polymer removal following etch-stop layer etch
TEXAS INSTRUMENTS INC35 citations88
US7476602B2Jan 13, 2009
N2 based plasma treatment for enhanced sidewall smoothing and pore sealing porous low-k dielectric films
TEXAS INSTRUMENTS INC10 citations82
US7101788B2Sep 5, 2006
Semiconductor devices and methods of manufacturing such semiconductor devices
TEXAS INSTRUMENTS INC4 citations61
US7910936B2Mar 22, 2011
N2 based plasma treatment for enhanced sidewall smoothing and pore sealing of porous low-k dielectric films
TEXAS INSTRUMENTS INC1 citations50
US7413994B2Aug 19, 2008
Hydrogen and oxygen based photoresist removal process
TEXAS INSTRUMENTS INC0 citations50