Inventor
HACHIYA MASAYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HACHIYA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUS7719669B2May 18, 2010
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH CORP13 citations83
US7916287B2Mar 29, 2011
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH CORP2 citations61
US7420668B2Sep 2, 2008
Wafer surface inspection apparatus and wafer surface inspection method
HITACHI HIGH TECH CORP3 citations60