Inventor
WOOD ROBERT LAVIN
US7 patents
⚠️ This page may combine multiple inventors who share the name “WOOD ROBERT LAVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6207787B1Mar 27, 2001
Antireflective coating for microlithography
IBM51 citations92
US5736301AApr 7, 1998
Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used
IBM20 citations89
US6051659AApr 18, 2000
Highly sensitive positive photoresist composition
IBM9 citations69
US5910337AJun 8, 1999
Phase-averaging resist coating for reflectivity control
IBM4 citations54
US6153696ANov 28, 2000
Process for forming carbonates of hydroxyaromatic compounds
IBM0 citations35