Inventor

KEARNEY PATRICK A

US3 patents

⚠️ This page may combine multiple inventors who share the name “KEARNEY PATRICK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV CALIFORNIA

2 patents

US6521897B1Feb 18, 2003

Ion beam collimating grid to reduce added defects

UNIV CALIFORNIA25 citations83

US6554968B1Apr 29, 2003

Method for measuring and controlling beam current in ion beam processing

UNIV CALIFORNIA3 citations57

SEMATECH INC

1 patent

US8865376B2Oct 21, 2014

EUVL process structure fabrication methods

SEMATECH INC0 citations47