Inventor

PANNING ERIC M

US4 patents

⚠️ This page may combine multiple inventors who share the name “PANNING ERIC M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTEL CORP

3 patents

US7098466B2Aug 29, 2006

Adjustable illumination source

INTEL CORP8 citations71

US7208747B2Apr 24, 2007

Adjustment of distance between source plasma and mirrors to change partial coherence

INTEL CORP3 citations60

US7316893B2Jan 8, 2008

Modular containment cell arrangements

INTEL CORP1 citations48

SEMATECH INC

1 patent

US8865376B2Oct 21, 2014

EUVL process structure fabrication methods

SEMATECH INC0 citations47