Inventor
MORILLO JAIME D
US9 patents
⚠️ This page may combine multiple inventors who share the name “MORILLO JAIME D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS7626702B2Dec 1, 2009
Overlay target and measurement method using reference and sub-grids
IBM60 citations97
US7474401B2Jan 6, 2009
Multi-layer alignment and overlay target and measurement method
IBM38 citations95
US6937337B2Aug 30, 2005
Overlay target and measurement method using reference and sub-grids
IBM56 citations95
US7876439B2Jan 25, 2011
Multi layer alignment and overlay target and measurement method
IBM8 citations83
US7359054B2Apr 15, 2008
Overlay target and measurement method using reference and sub-grids
IBM13 citations83
US9087740B2Jul 21, 2015
Fabrication of lithographic image fields using a proximity stitch metrology
IBM4 citations71
AUSSCHNITT CHRISTOPHER P
3 patentsUS9097989B2Aug 4, 2015
Target and method for mask-to-wafer CD, pattern placement and overlay measurement and control
AUSSCHNITT CHRISTOPHER P8 citations82
US8339605B2Dec 25, 2012
Multilayer alignment and overlay target and measurement method
AUSSCHNITT CHRISTOPHER P11 citations82
US8107079B2Jan 31, 2012
Multi layer alignment and overlay target and measurement method
AUSSCHNITT CHRISTOPHER P6 citations82