Inventor
HAERLE ANDREW G
US18 patents
⚠️ This page may combine multiple inventors who share the name “HAERLE ANDREW G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAINT GOBAIN CERAMICS
10 patentsUS6296716B1Oct 2, 2001
Process for cleaning ceramic articles
SAINT GOBAIN CERAMICS84 citations95
US6565667B2May 20, 2003
Process for cleaning ceramic articles
SAINT GOBAIN CERAMICS41 citations94
US6554909B1Apr 29, 2003
Process for cleaning components using cleaning media
SAINT GOBAIN CERAMICS22 citations91
US6723437B2Apr 20, 2004
Semiconductor processing component having low surface contaminant concentration
SAINT GOBAIN CERAMICS15 citations90
US9343321B2May 17, 2016
Chemical mechanical planarization using nanodiamond
SAINT GOBAIN CERAMICS6 citations83
US7053411B2May 30, 2006
Method for treating semiconductor processing components and components formed thereby
SAINT GOBAIN CERAMICS9 citations71
US6881262B1Apr 19, 2005
Methods for forming high purity components and components formed thereby
SAINT GOBAIN CERAMICS11 citations66
US7993420B2Aug 9, 2011
Ceria material and method of forming same
SAINT GOBAIN CERAMICS4 citations63
US7727919B2Jun 1, 2010
High resistivity silicon carbide
SAINT GOBAIN CERAMICS2 citations61
US8343415B2Jan 1, 2013
Ceramic particulate material and processes for forming same
SAINT GOBAIN CERAMICS0 citations48