Inventor
LU XIAOXU
US10 patents
⚠️ This page may combine multiple inventors who share the name “LU XIAOXU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS9865447B2Jan 9, 2018
High brightness laser-sustained plasma broadband source
KLA TENCOR CORP19 citations91
US10175555B2Jan 8, 2019
183 nm CW laser and inspection system
KLA TENCOR CORP12 citations83
US10044166B2Aug 7, 2018
CW DUV laser with improved stability
KLA TENCOR CORP10 citations83
US9525265B2Dec 20, 2016
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KLA TENCOR CORP6 citations83
US9509112B2Nov 29, 2016
CW DUV laser with improved stability
KLA TENCOR CORP13 citations83
US10429719B2Oct 1, 2019
183 nm CW laser and inspection system
KLA TENCOR CORP2 citations72
US10044164B2Aug 7, 2018
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KLA TENCOR CORP0 citations51
US9494531B2Nov 15, 2016
Multi-spot illumination for improved detection sensitivity
KLA TENCOR CORP1 citations51
US10032619B2Jul 24, 2018
High brightness laser-sustained plasma broadband source
KLA TENCOR CORP1 citations49