Inventor
HUNG CHI-YUAN
TW13 patents
⚠️ This page may combine multiple inventors who share the name “HUNG CHI-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MACRONIX INT CO LTD
3 patentsUS6887627B2May 3, 2005
Method of fabricating phase shift mask
MACRONIX INT CO LTD17 citations82
US6620564B2Sep 16, 2003
Method for patterning semiconductors through adjustment of image peak side lobes
MACRONIX INT CO LTD10 citations71
US6635394B2Oct 21, 2003
Three dimensional mask
MACRONIX INT CO LTD6 citations61
SEMICONDUCTOR MFG INT SHANGHAI
3 patentsUS8921013B2Dec 30, 2014
System and method for test pattern for lithography process
SEMICONDUCTOR MFG INT SHANGHAI0 citations46
US7914950B2Mar 29, 2011
Method and resulting structure for mosaic of multi-transmission rate optical mask structures
SEMICONDUCTOR MFG INT SHANGHAI0 citations41
US7033709B2Apr 25, 2006
Method and structure for fabricating patterns on phase shift mask for the manufacture of semiconductor wafers
SEMICONDUCTOR MFG INT SHANGHAI0 citations40