Inventor
WU HSIN-CHANG
TW12 patents
⚠️ This page may combine multiple inventors who share the name “WU HSIN-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
11 patentsUS6670715B2Dec 30, 2003
Bilayer silicon carbide based barrier
UNITED MICROELECTRONICS CORP37 citations92
US9397214B1Jul 19, 2016
Semiconductor device
UNITED MICROELECTRONICS CORP10 citations82
US7645678B2Jan 12, 2010
Process of manufacturing a shallow trench isolation and process of treating bottom surface of the shallow trench for avoiding bubble defects
UNITED MICROELECTRONICS CORP8 citations82
US6521300B1Feb 18, 2003
Method of a surface treatment in improving adhesion of an organic polymeric low-k dielectric layer
UNITED MICROELECTRONICS CORP19 citations81
US6653204B1Nov 25, 2003
Method of forming a shallow trench isolation structure
UNITED MICROELECTRONICS CORP13 citations80
US7105856B1Sep 12, 2006
Test key having a chain circuit and a kelvin structure
UNITED MICROELECTRONICS CORP13 citations76
US9373705B1Jun 21, 2016
Manufacturing method of a fin-shaped field effect transistor and a device thereof
UNITED MICROELECTRONICS CORP3 citations72
US6861104B2Mar 1, 2005
Method of enhancing adhesion strength of BSG film to silicon nitride film
UNITED MICROELECTRONICS CORP2 citations60
US9660086B2May 23, 2017
Fin-shaped field effect transistor
UNITED MICROELECTRONICS CORP0 citations51
US7008882B2Mar 7, 2006
Method and structure for the adhesion between dielectric layers
UNITED MICROELECTRONICS CORP0 citations51
US7172961B2Feb 6, 2007
Method of fabricating an interconnect structure having reduced internal stress
UNITED MICROELECTRONICS CORP0 citations40