Inventor
TUMA LUBOMIR
CZ4 patents
Patents
4 patentsUS9741525B1Aug 22, 2017
Charged-particle microscope with astigmatism compensation and energy-selection
FEI CO3 citations70
US9741527B2Aug 22, 2017
Specimen holder for a charged particle microscope
FEI CO3 citations62
US12080512B2Sep 3, 2024
Charged particle microscope for examining a specimen, and method of determining an aberration of said charged particle microscope
FEI CO0 citations55
US10134563B2Nov 20, 2018
Contactless temperature measurement in a charged particle microscope
FEI CO1 citations46