Inventor
ZHANG XINWEI
CN12 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG XINWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CSMC TECHNOLOGIES FAB1 CO LTD
4 patentsUS10077188B2Sep 18, 2018
Manufacturing method of MEMS chip
CSMC TECHNOLOGIES FAB1 CO LTD1 citations50
US9580301B2Feb 28, 2017
MEMS chip and manufacturing method therefor
CSMC TECHNOLOGIES FAB1 CO LTD0 citations50
US9903884B2Feb 27, 2018
Parallel plate capacitor and acceleration sensor comprising same
CSMC TECHNOLOGIES FAB1 CO LTD0 citations47
US9006867B2Apr 14, 2015
Monitoring structure and monitoring method for silicon wet etching depth
CSMC TECHNOLOGIES FAB1 CO LTD0 citations46