Inventor

PARK GWANG SIK

KR3 patents

⚠️ This page may combine multiple inventors who share the name “PARK GWANG SIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

2 patents

US10955360B2Mar 23, 2021

Structured illumination-based inspection apparatus and inspection method, and semiconductor device fabrication method including structured illumination-based inspection method

SAMSUNG ELECTRONICS CO LTD2 citations71

US12345521B2Jul 1, 2025

Optical measurement apparatus, measuring method using the same, and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations49

KOREA ADVANCED INST SCI & TECH

1 patent

US10082662B2Sep 25, 2018

3D refractive index tomography and structured illumination microscopy system using wavefront shaper and method thereof

KOREA ADVANCED INST SCI & TECH3 citations69