Inventor
O'LOUGHLIN JENNIFER
US13 patents
⚠️ This page may combine multiple inventors who share the name “O'LOUGHLIN JENNIFER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS9399228B2Jul 26, 2016
Method and apparatus for purging and plasma suppression in a process chamber
NOVELLUS SYSTEMS INC428 citations98
US7648899B1Jan 19, 2010
Interfacial layers for electromigration resistance improvement in damascene interconnects
NOVELLUS SYSTEMS INC78 citations97
US7858510B1Dec 28, 2010
Interfacial layers for electromigration resistance improvement in damascene interconnects
NOVELLUS SYSTEMS INC50 citations94
US9028924B2May 12, 2015
In-situ deposition of film stacks
NOVELLUS SYSTEMS INC7 citations82
ANTONELLI GEORGE ANDREW
2 patentsINTEL CORP
2 patentsLAM RES CORP
2 patentsUS9631276B2Apr 25, 2017
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
LAM RES CORP2 citations72
US10323323B2Jun 18, 2019
Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition
LAM RES CORP0 citations51